RWTH Aachen University, with more than 32,000 students, is one of the leading German institutions for science with a strong focus on applied, industry-relevant research. The work of the research centres of RWTH Aachen is closely oriented towards the current needs of industry. This leads to numerous developments that are patented and utilized.

The competence centres of RWTH Aachen achieve very effective cross-subject, inter-faculty collaboration in interdisciplinary networks while maintaining a high level of specialization and differentiation into distinct subject areas. RWTH is a member of the Juelich-Aachen Research Alliance, which includes top-quality research institutions within RWTH and Research Centre J├╝lich. The Department of Technology of Optical Systems has strong ties to the Fraunhofer Institute for Laser Technology and its industrial partners.

EXTATIC Contact Persons Professor Larissa Juschkin and Professor Peter Loosen: Academic leads for RWTH Aachen University.

The EXTATIC faculty at Aachen includes Peter Loosen, Larissa Juschkin and Serhiy Danylyuk who have published over 200 peer-reviewed papers, contributed to 9 books and authored more than 40 inventions. Peter Loosen is a member or head of numerous organisational committees and boards in the field of optical applications. Currently supervising 18 PhD students, he is responsible for administrative and financial management of the department. Larissa Juschkin, with experience in high-level industrial R&D, is currently leading all EUV activities in the department. This experience and the contacts will be invaluable in establishing and developing the DOC-INTRA modules of EXTATIC. Serhiy Danylyuk coordinates the collaboration with Research Centre Juelich within the Juelich-Aachen Research Alliance, closely related to the planned activities on nanostructuring and metrology.