Name: Tryus Maksym
Home Institution: RWTH
Host Institution: UNIPD
Cohort: 2013

Project Title

Development of XUV near edge reflection spectroscopy


The research project is devoted to development of multi-angle spectral extreme ultraviolet reflectometry and its application to layered systems and surface investigation.

Spectral reflectometry with extreme ultraviolet radiation (XUV, 5-40 nm wavelength) constitute a complementary approach to photoelectron spectroscopy with the possibility of non-destructive in-depth (up to several tens of nanometers) study of surfaces. Because of the very strong and element specific interaction of XUV with matter the method shows high sensitivity and contrast to buried thin interlayers.


High reflectivity in grazing-incidence geometry allows for surface sensitive analysis of ultrathin film systems and determination of thickness, roughness, elemental composition and density of every single layer. The region near elemental absorption edges in reflectivity spectra is of particular analytical interest, since the near-edge fine structure contains information about chemical bonds structure and local-site symmetry of a sample.

Comprehensive studies in this area, combined with very precise and controlled preparation of (application relevant) layer systems together with the detailed analysis of their structure and chemical composition will allow to establish a novel metrology method with high in-depth and surface sensitivity simultaneously.



Maksym Tryus studied physics in Taras Schevchenko National University of Kiev. He received a Master of Science Degree in Laser and Optoelectronic Physics in 2012. Maksym has started his scientific career in V.E. Lashkaryov Institute of Semiconductor Physics of National Academy of Sciences of Ukraine in 2010.

The field of his research included Raman spectroscopy of silicon carbide, carbon materials and biomorphic ceramics. Maksym has interest in non-destructive optical methods of material investigation, which is expressed with a concept “using light to probe matter”. Maksym has started his PhD in September 2013 in RWTH Aachen University. Current topic of his research is “Development of the near-edge extreme ultraviolet reflection spectroscopy”.